IBIS Document Library
DEPTH (Windows version)
by E. Szilágyi
DEPTH code [5] has now been developed further to calculate the energy and depth resolution of ion beam analysis methods as Rutherford backscattering spectrometry, Elastic recoil detection analysis. In this version Nuclear Reaction Analysis is not included.
The depth resolution part practically is the same than it was at the DOS version (as shown in Fig.1).
The spectrum simulation part has been improved significantly. Spectrum simulation with atomic resolution can be performed using a magnetic spectrograph (see Fig. 2, details are in ref 14.
Figure 1. Comparison of depth and energy resolution calculated by the DOS and Windows version for 1.6 MeV He ERD in SiH.
Figure 2. Spectrum simulation with monolayer resolution. a) for spectrum constructions the energy losses of the carbon planes and the elastic scattering cross section have to be calculated and the energy spread contributions as a function of depth (i.e., as a function of detected energy) have to be taken into account. b) Simulated energy spectrum compared to the measured one [G. Dollinger, C.M. Frey, A. Bergmaier, T. Faestermann, Nucl. Instr. and Meth. B 136-138 (1998) 603.]. All the energy spread effects accounted for. c) Simulated energy spectrum taking into account only the intrinsic energy spread contributions compared to the same experimental spectrum as in b). The simulated spectra were normalised to the experimental one between 18200 and 18250 keV.
Related publications:
1.
F. Pászti,
E. Szilágyi, E. Kótai:
Optimization of the
depth resolution in elastic recoil detection
Nucl. Instr. Meth. B 54 (1991) 507 - 512.
2. N.P.
Barradas, J.C. Soares, M.F. da Silva, E. Szilágyi, F. Pászti:
Study of multilayer
interface roughness using RBS with improved depth resolution
Nucl. Instr. Meth. B 94
(1994) 266 - 270.
3.
E.
Szilágyi, F. Pászti:
Theoretical
calculation of the depth resolution of IBA methods
Nucl. Instr. Meth. B 85
(1994) 616 - 620.
4.
E.
Szilágyi, F. Pászti, V. Quillet, F. Abel:
Optimization of the
depth resolution in ERDA of H using 12C ions
Nucl. Instr. Meth. B 85
(1994) 63 - 67.
5. E. Szilágyi, F. Pászti, G. Amsel:
Theoretical
approximations for depth resolution calculations in IBA methods
Nucl. Instr. Meth. B 100
(1995) 103 - 121.
6.
E.
Szilágyi, L.S. Wielunski, F. Pászti:
Theoretical
Approximation of Energy Distribution of Elastically Recoiled Hydrogen Atoms
Nucl. Instr. Meth. B
136-138 (1998) 701 - 706.
7.
L.S.
Wielunski, E. Szilágyi, G.L. Harding:
Multiple Scattering
Effects in Elastic Recoil Detection Depth Resolution
Nucl. Instr. Meth. B
136-138 (1998) 713 - 718.
8.
E.
Szilágyi:
Energy spread in ion
beam analysis
Nucl. Instr. Meth. B
161-163 (2000) 37 - 47.
9. E. Szilágyi:
On the limitations
introduced by energy spread in elastic recoil detection analysis
Nucl. Instr. Meth. B 183
(2001) 25 - 33.
10.
E.
Szilágyi, E. Kótai, Z. Zolnai, G. Battistig, T. Lohner, J. Gyulai:
Ion implantation
induced damage in silicon carbide studied by non-Rutherford elastic
backscattering
2000 International
Conference on Ion Implantation Technology (IIT'2000) Proceedings, Alpbach,
Austria, 17-22 September 2000, (Eds.: H. Ryssel, L. Frey, J. Gyulai, H.
Glawishing), IEEE 00EX432, ISBN 0-7803-6462-7, 2000, pp.131-134.
11.
E.
Szilágyi, N.Q. Khánh, Z.E. Horváth, T. Lohner, G. Battistig, Z. Zolnai, E.
Kótai, J. Gyulai:
Ion Bombardment
Induced Damage in Silicon Carbide Studied by Ion Beam Analytical Methods
Mater. Sci. Forum
353-356 (2001) 271 - 274.
12.
L.S.
Wielunski, D. Grambole, U. Kreissig, R. Grötzschel, G. Harding, E. Szilágyi:
Hydrogen depth
resolution in multilayer metal structures, comparison of elastic recoil
detection and resonant nuclear reaction method
Nucl. Instr. Meth. B 190
(2002) 693 - 698.
13.
E. Rauhala,
N.P. Barradas, S. Fazinic, M. Mayer, E. Szilágyi, M. Thompson:
Status of ion beam
data analysis and simulation software
Nucl. Instr. Meth. B 244
(2006) 436 - 456.
14.
N.P.
Barradas, K. Arstila, G. Battistig, M. Bianconi, N. Dytlewski, C. Jeynes, E. Kótai, G. Lulli, M. Mayer, E.
Rauhala, E.
Szilágyi, M. Thompson:
International Atomic
Energy Agency intercomparison of Ion Beam Analysis software
Nucl. Instr. and Meth. in
Phys. Res. B (2007) 281-303.
download
WDEPTH.ZIP (Last modification: 27.08.2007) This
version
was used in IAEA
intercomparison of IBA software.