*========================================================================* | I O N | *------------------------------------------------------------------------* | News and views within the Ion Beam Community | *========================================================================* | Authors bear full responsibility for their contributions | *========================================================================* I O N Tuesday, August 10 1999 Volume 99 : Number 004 Heiner Ryssel : IIT 2000 ---------------------------------------------------------------------- Date: Mon, 09 Aug 1999 18:44:24 +0200 From: Heiner Ryssel Subject: Heiner Ryssel : IIT 2000 XIIIth International Conference on Ion Implantation Technology (IIT 2000) =09 Call for Papers School: September 14-16, 2000=20 Conference: September 17-22, 2000 Alpbach, Austria General The International Conference on =BBIon Implantation Technology=AB (IIT 2000)= is the thirteenth in a biannual series that began in 1977. In the first year of the new millennium, IIT 2000 will be held on September 17-22, 2000 in Alpbach (Tyrol, Austria) in the scenic Alps. The conference will be preceded by a three-day =BBIon Implantation School=AB from Sept. 14-16,= 2000. During the conference, an exhibition of ion implantation related equipment takes place. The aim of the conference is to stimulate discussions of various aspects of ion implantation processing from ion beam system design to device manufacturing. This diversity is the great strength of the conference enabling people working in all aspects of ion implantation to meet and talk. Technical Sessions=20 Both oral and poster sessions are planned. The oral sessions will be arranged in series, and will be introduced with invited, keynote presentations by speakers of international reputation. This gathering of specialists is a unique opportunity to explore a wide range of ion beam related topics in conference sessions. The official language of the conference, English, will be used for all presentations and printed material. Conference Subjects o Process Control - - charging - - contamination - - dose control - - beam heating - - in situ monitoring - - oxide integrity, throughput o Safety and Environment - - SDS - - X-rays o Implanter Systems - - low energy - - high energy - - large-area implantation - - vacuum systems - - ion optics - - new sources o Ion Solid Interactions=20 - - range - - damage - - channeling - - modeling o Emerging Techniques & Processes=20 - - cluster implantation - - plasma immersion o Processing and Devices - - sub 0.1 =B5m CMOS - - SOI - - flat panel displays - - power devices o Annealing=20 - - RTP - - TED - - diffusion o 300 mm Manufacturing =20 Call for Papers Participants wishing to present an oral or a poster paper are invited to submit an abstract before March 2000. The papers must be relevant to the themes of the Conference, detailed in this announcement. Please submit the abstract by e-mail as an attachment in Word or WordPerfect. If this is not possible, please submit a camera ready print. The abstract should be typed (single spaced 10 point font or larger) to fill a 17 cm by 25 cm space, on one page maximum, and must include the title, authors, results, figures, and references. The name of the author representing the work should be underlined and his or her full address, telephone, fax, and e-mail should be provided on a cover sheet. The session most appropriate for the presentation should be indicated. The review and acceptance of all submitted abstracts will be based on technical content and quality. Notification of the accepted papers will be given by April 28, 2000. Short Course The conference will be preceded by a three day Ion Implantation School on Sept. 14 - 16, 2000, held at the Alpbach Conference Center. Manufacturers' Exhibition A manufacturers' exhibition of ion beam, vacuum equipment, and other products relevant to ion implantation equipment or processing will be accommodated at the Conference lobby. The technical program will include scheduled visits to the exhibition where refreshments will be provided. Exhibitors may obtain further information by writing to the IIT 2000 Organizing Committee. Proceedings An Extended Abstract booklet will be published prior to the meeting and distributed at the conference. The proceedings will be published as a hardbound volume and a copy will be sent to all registrants. Venue=20 Alpbach is located at a sunny plateau of the Alpbach valley at an altitude of 1000 meters (3281 feet). The convention center, well-suited for congresses, conventions, and seminars, is named after the poet Paula von Preradovic. Detailed information on Alpbach can be found in the web under www.tiscover.com/alpbach. Accomodation A limited number of hotel rooms in different categories have been reserved in Alpbach. Most of the hotel rooms in Alpbach are located within 5 min. walking distance from the conference site.=20 Travel The nearest airports are at Innsbruck (57 km or 36 miles), Salzburg (150 km or 94 miles) and Munich (160 km or 100 miles). It is strongly recommended to use the Munich Airport. Buses will be provided on September 17 to bring attendees to Alpbach and on September 23 to bring them back to the airport. Alternatively, cars can be rented at the airport from all major rental companies. Driving time to Alpbach from the Munich Airport is approx. 1.5 to 2 hours. Detailed information about how to reach Alpbach by car can be found in the web under http://www.cwlease.com/cwlint/index2.htm. =20 Spouse Program A spouse program will be arranged for the time of the conference. The Inn valley nearby offers a variety af cultural attractions and leisure activities. In early autumn, it's a special pleasure to take a walk through the surrounding mountain ranges.=20 Conference Registration The final call for registration will be made in May 2000. The conference fee is expected to be about 480 =80 (approx. 480 US$). It will include a= copy of the proceedings, refreshments, and the conference dinner.=20 Conference Chairmen Prof. Jozsef Gyulai Hungarian Academy of Sciences P.O. Box 49 H-1525 Budapest Hungary Tel: +36-1-395-9253 Fax: +36-1-395-9284 E-mail: gyulai@mfa.kfki.hu Dr. Hans Glawischnig Infineon Technologies K=F6nigsbr=FCcker Strasse 150 01099 Dresden Germany Tel: +49-351-886-7913 Fax: +49-351-886-7902 E-mail: hans.glawischnig@infineon.com Prof. Heiner Ryssel Fraunhofer Institut Integrierte Schaltungen Schottkystrasse 10 91058 Erlangen Germany Tel: +49-9131-761-100 Fax: +49-9131-761-102 E-mail: ryssel@iis-b.fhg.de=20 Local Organisation Committee G. Battistig (MFA, Hungary) =09 L. Frey (IIS-B, Germany) =09 K. Funk (Eaton, USA) =09 H. Glawischnig (Infineon, Germany) =20 J. Gyulai (MFA, Hungary) =09 D. Henke (Infineon, Germany) =09 F. Kr=F6ner (Infineon, Germany) =09 E. Lautner (IIS-B, Germany) H. Lendzian (Varian, USA)=20 P. Petrik (MFA, Hungary) R. Ploss (Siemens, Germany) H. Ryssel (IIS-B, Germany) R. Schork (IIS-B, Germany) K.-H. Stegemann (ZMD, Germany) M. Waitschull (Texas Instruments, USA) International Committee D. Aitken (Superion Ltd., UK)=09 Y. Akasaka (Applied Materials, Japan) I. Baumvol (Inst. di Fisica U.F.R.G.S., Brazil) R. L. Brown (ATMI, USA) L.J. Chen (Nat. Tsing Hua Univ. Taiwan, China)=09 N.W. Cheung (Univ. of Calif., USA) M.I. Current (USA) G. Ferla (Italy)=20 F. Ferrari (Libera Univ. Trento, Italy) =09 H. Glawischnig (Infineon, Germany) J. Gyulai (MFA, Hungary) P.L.F. Hemment (Univ. of Surrey, UK) K.S. Jones (Univ. of Florida, USA)=09 H. Komiya (Semicond. Leading Edge, Japan) R. Koudijs (High Voltage Engineering, NL)=09 L.A. Larson (SEMATECH, USA) M.E. Mack (Eaton Corp., USA) =09 K. Matsuda (NISSIN Ion Equipment, Japan) C.M. McKenna (Varian, USA) S. Moffatt (Applied Materials, UK) H. Mori (Fujitsu, Japan) K.H. Purser (Southern Cross Corp., USA)=09 E. Rimini (Dipart. di Fisica Catania, Italy) P.H. Rose (Krytek Corp., USA) G. Ryding (Eaton Corp., USA) H. Ryssel (IIS-B, Germany) R.B. Simonton (Eaton Corp., USA) T.C. Smith (Motorola, USA) K.G. Stephens (Univ. of Surrey, UK) Mikio Takai (Osaka Univ., Japan)=20 A. Tasch (Univ. of Texas, USA) Toshinori Takagi (Univ. of Kyoto, Japan) A. F. Vyatkin (Russ. Acad. Of Sciences, Russia) W.H. Weisenberger (Ions Inc., USA) J.S. Williams (Australian Nat. Univ. Canberra, Australia) A. Wittkower (SOITEC, USA) I. Yamada (Univ. of Kyoto, Japan) J.F. Ziegler (BM-Research, USA) S. C. Zou (Shanghai Hua Hong Nec, China) Important Dates Deadline for Abstracts March 17, 2000 Notification of Acceptance April 28, 2000 Deadline for Pre-Registration June 30, 2000 School Sept. 14-16, 2000 Conference Sept. 17-22, 2000 Correspondence IIT 2000 Organizing Committee c/o IIS-B Schottkystrasse 10 91058 Erlangen Germany Tel: +49-9131-761-100 Fax: +49-9131-761-102 E-mail: iit2000@iis-b.fhg.de Latest Information http://www.mfa.kfki.hu/IIT2000/ - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - I am interested in the XIIIth International Conference on Ion Implantation Technology and wish to receive further information.=20 o I plan to attend the conference o I plan to attend the school o I plan to submit a paper on the following subject: _____________________________________________________________ o Please send me ... copies of the printed version of the Call for Papers o I cannot attend this time, but please keep me on the mailing list o Mr. o Ms. o Dr. o Prof. else:________________________________________ Family name:______________________________________________________________ First name(s):____________________________________________________________ Company name:_____________________________________________________________ Department, mailstop:_____________________________________________________ Street address:___________________________________________________________ City:_____________________________________________________________________ State/Country:____________________________________________________________ (Please place the zip code, postal code, street number, etc. according to=20 your local practice) Tel:______________________________________________________________________ Fax:______________________________________________________________________ Email:____________________________________________________________________ Please send an e-mail with your response or print this form, fill it in and= =20 fax it to: +49-9131-761102 or mail it to the Organizing Committee (address above). =20 IIT 2000 c/o IIS-B Schottkystrasse 10 91058 Erlangen Germany Tel:+49-9131-761-100 Fax:+49-9131-761-102 email: iit2000@iis-b.fhg.de ------------------------------ End of I O N V99 #4 ******************* *-----------------------------------------------------------------------* | I O N - part of the IBIS, the Ion Beam Information System | *-----------------------------------------------------------------------* | Editors: | | E. Szilagyi (szilagyi@rmki.kfki.hu) | | G. Battistig (battisti@ra.atki.kfki.hu) | | Z. Hajnal (hajnal@sunserv.kfki.hu) | | | | Contributions to ION: ion@sunserv.kfki.hu | | | | For more info mail to: ion-request@sunserv.kfki.hu | | with a single word in the mail body: INFO | | | | IBIS is now available on-line at http://www.kfki.hu/~ionhp/ | *-----------------------------------------------------------------------*